Products
Semiconductor Equipment
Particle Pro M1000 [0.1 um sensitivity]
Inspection of particles in Shower Head/
Cathode and Device of cleaning prior to
the installation of equipment For detailsParticle Pro M2000 [10 nm sensitivity]
Inspection of particles in Shower Head/
Cathode and Device of cleaning prior to
the installation of equipment for particles
of 0.1um or bigger For detailsThe equipment above is available in the market from Nov. 2014..
Particle Testers for Cleanroom Materials / Consumables
Particle House OTUM-1100
Device which detects, tests and evaluates
the particles from cleanroom garment, clean
room, wiper, cleaning products, and packing
materials.(Device having the best sensitivity
as of now)
(0.1 um sensitivity, and 4 level sensitivity)
(All processes are automatically conducted
from testing to the printing of report) For detailsParticle House OTUM-800
Device which detects, tests and evaluates
the particles from cleanroom garment, clean
room, wiper, cleaning products, and packing
materials.
There are four models such as 800, 801, 802
and 800 shoes. 800 shoes are designed for
the dust-proof shoes. It is the new product
which is available from Nov. 2014. For details