Products

Semiconductor Equipment

Monaco 1000 [0.1 um sensitivity]
Inspection of particles in Shower Head/ Cathode and Device of cleaning prior to the installation of equipment For details
Monaco 2000 [10 nm sensitivity]
Inspection of particles in Shower Head/ Cathode and Device of cleaning prior to the installation of equipment for particles of 0.1um or bigger For details

The equipment above is available in the market from Nov. 2014..


Surface Particle Control

DD-100 / DD-100 Plus
This is the testing paper for the sampling of large particles (10 ~ 100um). It is the testing film for sampling, which is designed to separate the particles from the surface in order to inspect the particles using the microscopic inspection, visual check and magnification inspection as well as the cause of occurrence and remove the particles. For details

The equipment above is available in the market from Nov. 2014.


Particle Testers for Cleanroom Materials / Consumables

OTUM 1100
Device which detects, tests and evaluates the particles from cleanroom garment, clean room, wiper, cleaning products, and packing materials.(Device having the best sensitivity as of now) (0.1 um sensitivity, and 4 level sensitivity) (All processes are automatically conducted from testing to the printing of report) For details
OTUM 800 series
Device which detects, tests and evaluates the particles from cleanroom garment, clean room, wiper, cleaning products, and packing materials. There are four models such as 800, 801, 802 and 800 shoes. 800 shoes are designed for the dust-proof shoes. It is the new product which is available from Nov. 2014. For details