SEMICONDUCTOR EQUIMENT Monaco 1000

Particle Detection/Clean System - MONACO 1000

0.1 um Particle Controlled (Inspection of particle from the super clean equipment parts)

Features / Benefits

- Inspection of particles from semiconductor manufacturing devices
- Inspection of hole in the parts having the hole
- Realization of close to zero in the background particle level
- Improvement in performance compared to 1000 Cynos R2
- Easy to change the flow of fluid using the pressurized spraying mode/ absorption mode/ combination mode
- Easy to set and adjust the condition for each sample by applying the computer recipe


Basic Specifications

- Sensitivity : Detection of particles of 0.1 um or bigger (Contact us for the small particles such as 10nm)
- Power : 220 v (50 Hz, 60 Hz) 15 A
- Utility Gas : N2 (1/4???), Compressed Air (Filtered 1/4???)
- Chamber : Class 1 Background level
- Interface to Particle Counter : RS 232 , RS 485, Ethernet etc
- Dimension : Main Body :920mm (w) x 1200mm(d) x 1920mm(h) 350kg


Applications - Target sample

- Inspection of ShowerHead hole and surface particle
- Inspection of equipment parts formed with hole


Applications - Field/companies

- Manufacturer of semiconductor elements: Inspection prior to the installation of parts to equipment/incoming inspection
- Manufacturer of semiconductor equipment: Inspection prior to the installation of parts to equipment/incoming inspection
- Manufacturer of parts for semiconductor equipment: incoming inspection/ shipping inspection
- Cleaning of parts: Inspection before and after cleaning/ In-process inspection/ shipping inspection
  *Registration of patent (1014832240000)/ brand: T-Micron
  The brand of Monaco series is changed from NENE to T Micron from Nov. 1, 2014 (It would be described on the top left of the equipment.)